Capacitance Probe - Any probe which utilizes the measured electrical capacitance between it and a reference surface. The capacitance is related geometrically to the separation and overlap area between the probe and reference object.

May be used for measuring displacement between two objects or structures.

For a planar probe, the capacitance is epsilon times A divided by d  where epsilon is the dielectric constant of the material between the probe and object, A is the area of the probe, and d is the gap between the probe and object.